SEREN R301 Betreibershandbuch

SEREN INDUSTRIAL POWER SYSTEMS INC. R301 RADIO FREQUENCY POWER SUPPLY OPERATOR’S MANUAL Revision: 0.05 Standard Configuration PRELIMINARY

R301 RF POWER SUPPLY OPERATOR’S MANUAL RF Output Connection: Connect the R301 RF Power Supply’s RF output to a suitable load via a coaxial cable. De

R301 RF POWER SUPPLY OPERATOR’S MANUAL Front Panel Controls and Display: Buttons Item Name Description 1 Program/Run Toggles the R301 RF Power Su

R301 RF POWER SUPPLY OPERATOR’S MANUAL Display The front panel display shows the operational status of the R301 RF Power Supply and provides legends f

R301 RF POWER SUPPLY OPERATOR’S MANUAL Operation Front panel operation of the R301 RF Power Supply is simple. This section describes the use and ope

R301 RF POWER SUPPLY OPERATOR’S MANUAL 2. Press the DOWN button (item 2) or the UP button (item 3) until line 3 of the display shows the current cont

R301 RF POWER SUPPLY OPERATOR’S MANUAL · The “VOLTAGE” (VLT) leveling mode uses an external feedback voltage (derived from a Voltage Probe in the pr

R301 RF POWER SUPPLY OPERATOR’S MANUAL 6. Press the “VALUE UP” button (item 5) or “VALUE DOWN” (item 6) until line 3 of the display indicates the des

R301 RF POWER SUPPLY OPERATOR’S MANUAL Basic Analog Interface Operation Refer to the Rear Panel Controls and Connections and the Typical Interface Co

R301 RF POWER SUPPLY OPERATOR’S MANUAL Note: the RFON* signal is edge triggered. A transition from a TTL “high” to TTL “low” logic state must occur t

R301 RF POWER SUPPLY OPERATOR’S MANUAL Basic Serial Interface Operation <SERIAL INTERFACE NOT IMPLEMENTED> Refer to the Rear Panel Controls and

R301 RF POWER SUPPLY OPERATOR’S MANUAL Introduction Thank you for acquiring your new SEREN IPS product. The R301 Radio Frequency Power Supply has be

R301 RF POWER SUPPLY OPERATOR’S MANUAL d. Press the RUN button (item 5) to exit the programming menu. 5. Send the desired serial command to the R30

R301 RF POWER SUPPLY OPERATOR’S MANUAL Character #3: Setpoint Source 2 = Serial Interface, 1 = Analog Interface, 0 = Front Panel Character #4: Stat

R301 RF POWER SUPPLY OPERATOR’S MANUAL command. A negative (-) polarity signal is assumed. Command: 0? Response: -XXXX DR Select VOLTAGE CONTROL mod

R301 RF POWER SUPPLY OPERATOR’S MANUAL Response: <prompt><cr> S Disable the RF Output Command: S<cr> Response: <prompt><cr

R301 RF POWER SUPPLY OPERATOR’S MANUAL NOECHO Disable ECHO mode Suppresses the echo of commands. Response for accepted (acknowledged) commands is &

R301 RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND REFERENCE CHART NOTES: The underscore character ( _ ) indicates a space <crlf> indicates

R301 RF POWER SUPPLY OPERATOR’S MANUAL To Send Description/Comment Select VOLTAGE CONTROL mode DR<cr> Sets the Analog Interface connector FEE

R301 RF POWER SUPPLY OPERATOR’S MANUAL To Send Description/Comment Response: <prompt><cr> Set the Process Pulse Low Power Setpoint XXXX_

R301 RF POWER SUPPLY OPERATOR’S MANUAL Configuring Programmable Parameters Navigating the Programming Menu TO ENTER the programming mode, press the “

R301 RF POWER SUPPLY OPERATOR’S MANUAL LEVEL PARAMETER DISPLAY LINE 3 OPTION 6 Output Power Range Select HIGH RANGE LOW RANGE 0-300W Output* 0-3

R301 RF POWER SUPPLY OPERATOR’S MANUAL TABLE OF CONTENTS Safety Notes ………………………………………………………………………... 3 R301 RF Power Supply Features …………………………………

R301 RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS: Level Parameter Detail Control Source: Selects the interface used as the cont

R301 RF POWER SUPPLY OPERATOR’S MANUAL Level Parameter Detail POWER CONTROL: Uses the R301’s internal power sensor as the feedback source for regula

R301 RF POWER SUPPLY OPERATOR’S MANUAL Level Parameter Detail 7 Exciter Mode (Frequency Source) Select: EXCITER- MASTER: The unit uses its intern

R301 RF POWER SUPPLY OPERATOR’S MANUAL Level Parameter Detail 12 DC Voltage Control Gain Factory default setting is 100% Matching Network Preset M

R301 RF POWER SUPPLY OPERATOR’S MANUAL Level Parameter Detail Factory default setting is 50% 15 Tune Capacitor Preset Position: Sets the Tune Capa

R301 RF POWER SUPPLY OPERATOR’S MANUAL Rear Panel Controls and Connections 46521739AAN1CEXOUTCEXINOGLLPOWERRF OUTAREIS!DCP8 1. RF Output Type “N” fe

R301 RF POWER SUPPLY OPERATOR’S MANUAL Connect the supplied power cord to the power inlet and connect to mains power. If the power cord is lost or

R301 RF POWER SUPPLY OPERATOR’S MANUAL When in Slave mode, the R301 RF Power Supply uses the common exciter input as its frequency source. 7. Fan Ex

R301 RF POWER SUPPLY OPERATOR’S MANUAL PIN SIGNAL NAME DESCRIPTION This signal is active in Panel, Analog, or Serial control modes 2 INTERLOCK Exte

R301 RF POWER SUPPLY OPERATOR’S MANUAL PIN SIGNAL NAME DESCRIPTION 7 GATE External Pulse Train input. Toggles output power between setpoint value

R301 RF POWER SUPPLY OPERATOR’S MANUAL Safety Notes POINTEQUIPOTENTIAL BONDING!GROUND=PROTECTIVE= CAUTION=HIGHVOLTAGE=RADIO FREQUENCYENERGY HAZARD=The

R301 RF POWER SUPPLY OPERATOR’S MANUAL PIN SIGNAL NAME DESCRIPTION pre-position Seren IPS Inc. AT-Series Matching Networks. Refer to “Matching Netwo

R301 RF POWER SUPPLY OPERATOR’S MANUAL PIN SIGNAL NAME DESCRIPTION chassis ground. 18 GNDI Ground return for pins 3,4,5,6,7,8,13,19. Internally co

R301 RF POWER SUPPLY OPERATOR’S MANUAL TYPICAL INTERFACE CIRCUITS Figures 1 through 5 illustrate the typical circuits used in the R301 RF Power Suppl

R301 RF POWER SUPPLY OPERATOR’S MANUAL Figure 2: TTL-Compatible Input Circuits SETPOINT Input Circuit High-impedance, high Common-Mode Rejection Ra

R301 RF POWER SUPPLY OPERATOR’S MANUAL MONITOR Output Circuit Analog output, selectable 0 to +5VDC or 0 to +10VDC range via front panel controls. Nor

R301 RF POWER SUPPLY OPERATOR’S MANUAL 9. Serial Interface Connector The serial interface provides remote control and monitoring of the R301 RF Powe

R301 RF POWER SUPPLY OPERATOR’S MANUAL TYPICAL INTERFACE CONNECTIONS Analog Control There are many possible analog interface wiring schemes. Basic

R301 RF POWER SUPPLY OPERATOR’S MANUAL External Feedback with Probe Inverter Option The R301 RF power supply’s external feedback input (FEEDBACK, anal

R301 RF POWER SUPPLY OPERATOR’S MANUAL External Feedback with Seren IPS AT-Series Matching Networks External feedback is also available when using a S

R301 RF POWER SUPPLY OPERATOR’S MANUAL Typical System Configuration A basic plasma processing system configuration is diagrammed below. Other system

R301 RF POWER SUPPLY OPERATOR’S MANUAL Never push objects of any kind into the slots and openings of the R301 RF Power Supply’s enclosure. They may t

R301 RF POWER SUPPLY OPERATOR’S MANUAL Maintenance The R301 Radio Frequency Power Supply is designed to be maintenance free. There are no user maint

R301 RF POWER SUPPLY OPERATOR’S MANUAL Problem Solving Problem Solving Chart The following chart lists some conditions that may occur and the recomm

R301 RF POWER SUPPLY OPERATOR’S MANUAL Condition Suggested Solution source signal. Ensure the setpoint signal is connected to the Analog Interface Co

R301 RF POWER SUPPLY OPERATOR’S MANUAL Technical Data AC Mains Input Power Voltage Taps: 98V, 115V, 208V, or 220V; Single-phase, factory configured.

R301 RF POWER SUPPLY OPERATOR’S MANUAL Spurious Radiation: Designed to meet or exceed FCC requirements. Harmonics: -50dBc Noise, Hum, and Ri

R301 RF POWER SUPPLY OPERATOR’S MANUAL SEREN 1 Year Limited Warranty SEREN IPS Inc. products are warranted to the original purchaser against defects

R301 RF POWER SUPPLY OPERATOR’S MANUAL Glossary of Terms A Amperes, a measurement unit of current AC Alternating Current ANLG Abbreviation, “Analog”

R301 RF POWER SUPPLY OPERATOR’S MANUAL RF Radio Frequency RF Generator Industry term for Radio Frequency Power Supply TTL Transistor-Transistor Logic

R301 RF POWER SUPPLY OPERATOR’S MANUAL Page 57 Seren IPS Inc. 6100130000 Rev. 0.05 Revision History: Revision Date Revision Description 0.01 1019/0

R301 RF POWER SUPPLY OPERATOR’S MANUAL R301 Radio Frequency Power Supply Features The R301 RF Power Supply is intended for use with radio frequency p

R301 RF POWER SUPPLY OPERATOR’S MANUAL Physical Dimensions ON / OFFR301RADIO FREQUENCY POWER SUPPLYPOWEROISERENIndustrial Power SystemsRF0.00 [0.00]

R301 RF POWER SUPPLY OPERATOR’S MANUAL 0.00 [0.00]0.89 [22.50]1.86 [47.12]2.62 [66.47]4.32 [109.60]0.00 [0.00]2.59 [65.81]5.31 [134.95]0.87 [22.15]5

R301 RF POWER SUPPLY OPERATOR’S MANUAL Installation: Recommended mounting: The R301 RF Power Supply is designed for placement on a tabletop or on a s